Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Authors
Lobanov A.V.

Lobanov A.V.

Mail:

JSC “Scientific Research Institute Submicron”
Zelenograd

Lobanov A.V., Dr. Sc. (Eng.), Senior Researcher, Scientific Secretary, JSC “Scientific Research Institute Submicron”.

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