Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Article

A calculation approach for pumping performance of a kinetic high vacuum pump

Published: 10.10.2013

Authors: Demikhov K.E., Makarov A.M., Nikulin N.K., Svichkar E.V.

Published in issue: #5(17)/2013

DOI: 10.18698/2308-6033-2013-5-765

Category: Engineering | Chapter: Vacuum and air compressors

The paper presents an approach for calculation of a kinetic high vacuum pump pumping performance for molecular mode of a gas flow. The calculation is based on the general assumption for gas molecular-kinetic theory: thermal motion velocity molecular distribution is described by Maxwellian distribution, gas molecules interaction is absent, the interaction of a solid body surface and gas molecules is described in terms of the diffuse reflection law, the accommodation coefficient equals unity. Direct statistical modeling for calculations of flow parts pumping features and analytic dependence connecting their joint operation enabled sufficiently to reduce calculation time with no decrease in calculation accuracy and with no distortion of pumping physics. The suggested mathematical relations allow to calculate present kinetic high vacuum pumps (turbomolecular, molecular and combined turbomolecular with molecular stages) considering the effect of a suction branch and overflows in pump flow parts.