The Application of Nanotechnology methods for Manufacturing of a Plate of a Pendulous Accelerometer | Engineering Journal: Science and Innovation
Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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Article

The Application of Nanotechnology methods for Manufacturing of a Plate of a Pendulous Accelerometer

Published: 15.10.2013

Authors: Sagatelyan G.R., Novosyolov K.L., Shishlov A.V., Shchukin S.A.

Published in issue: #6(18)/2013

DOI: 10.18698/2308-6033-2013-6-805

Category: Nanoengineering

The issues of nanotechnological maintenance of indicators of the quality of the plates of pendulous accelerometers are considered. The application of two-side lapping with bounded abrasive to provide the required flat-parallelism of plates is justified. The possibility to form the ledges and hollows as parts of the design of the plate, by the method of plasma-chemical etching is shown. The procedure of ensuring the uniform thickness of thin film coatings, which are used as the mask for the plasma-chemical etching, is suggested.