All articles by "Zakharov P.S."

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Integrated circuit metallization edge study by confocal microscopy

Published: 15.10.2013

Authors: Zakharov P.S., Zayonchkovskiy V.S., Baskakov E.B.

Published in issue: #6(18)/2013

DOI: 10.18698/2308-6033-2013-6-808

Category: Nanoengineering

Characteristics of low-resistance path in silicon suboxide thin films

Published: 15.10.2013

Authors: Zakharov P.S., Zayonchkovskiy V.S., Baskakov E.B.

Published in issue: #6(18)/2013

DOI: 10.18698/2308-6033-2013-6-797

Category: Nanoengineering

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