Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
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A calculation approach for pumping performance of a kinetic high vacuum pump

Published: 10.10.2013

Authors: Demikhov K.E., Makarov A.M., Nikulin N.K., Svichkar E.V.

Published in issue: #5(17)/2013

DOI: 10.18698/2308-6033-2013-5-765

Category: Engineering | Chapter: Vacuum and air compressors

    molecular pump, turbomolecular pump, kinetic pump, statistical modeling, probability, conductivity, response, pressure, molecule
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