Optimization of a low pressure sputter-ion sensor
Authors: Zhakin A.I., Grimov A.A., Lutsenko A.A., Pikkiev V.A.
Published in issue: #5(53)/2016
DOI: 10.18698/2308-6033-2016-5-1491
Category: Aviation and Rocket-Space Engineering | Chapter: Innovation Technologies of Aerospace Engineering
The article discusses theoretical and experimental studies of low-pressure sputter-ion sensors in nitrogen-oxygen plasma. Sensor is an electrode system in the form of a cylindrical capacitor with crossed electric and magnetic fields. The magnetic field allows for maintaining the sustainable development of the electric discharge. There suggested the system of plasma chemical equations upon which expression for the dependence of the current from the applied voltage and the sensor pressure was obtained. The agreement of the results of theoretical and experimental studies is satisfactory. Based on these results recommendations for optimizing the sensor are provided - the sensor size is decreased and the accuracy of the pressure measurements is increased.
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