Engineering Journal: Science and InnovationELECTRONIC SCIENCE AND ENGINEERING PUBLICATION
Certificate of Registration Media number Эл #ФС77-53688 of 17 April 2013. ISSN 2308-6033. DOI 10.18698/2308-6033
  • Русский
  • Английский
Article

In situ Laser interferometric holoellipsometry with normal and brewster reflections of light

Published: 19.10.2013

Authors: Ali Mohammed , Kachurin Yu.Yu., Kirjanov A.P.

Published in issue: #7(19)/2013

DOI: 10.18698/2308-6033-2013-7-836

Category: Instrumentation | Chapter: Optical engineering

This paper presents in situ holoellipsometry using a laser interferometric holoellipsometer with binary modulation of the polarization and of the both normal and Brewster reflection of polarized light from an optical uniaxial bi-dimensional crystal posted in the arm of Michelson interferometer, which is used as a technical basis for the device.